C05200 - SEMI C52 - 特殊ガスの貯蔵寿命に関する仕様 Revision:SEMI C52-0301 (Reapproved 0312) - Superseded o substrates in one or

o substrates in one or more process modules where the recipe execution begins and ends simultaneously for all substrates in the process module

SEMI E99 — Carrier ID Read/Write Functional Standard

3-0600 (Withdrawn 0811) — Specification for Rectangular Polished Monocrystalline Indium Phosphide Wafers

calibration procedures

3 — Specification for Product Time Measurement for Transport

C05200 - SEMI C52 - 特殊ガスの貯蔵寿命に関する仕様 Revision:SEMI C52-0301 (Reapproved 0312) - Superseded o substrates in one orglobal Gases Technical Committee20001220global Audits and Reviews Subcommittee20011www. semiviews. org www. semi. org20013 , , Referenced SEMI Standards None.